Asked by meMS

Which one of the following statements is true for micromachining?
For Si micromachining alkaline etchants produce isotropic features
Xenon fluoride (dry etch of Si) produces an isotropic feature after etching
BrF3 (dry etch of Si) produces anisotropic feature after etching
All of these

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Answered by Ankit Panthi
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Answered by Rahul
Yes
Answered by Tahid
All of these
Answered by kanny100%
anyone on here??
Answered by Satha
All of these
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