Which one of the following statements is true for micromachining?

Question

For Si micromachining alkaline etchants produce isotropic features
Xenon fluoride (dry etch of Si) produces an isotropic feature after etching
BrF3 (dry etch of Si) produces anisotropic feature after etching
All of these

Answer 1

Ans

Answer 2

Yes

Answer 3

All of these

Answer 4

anyone on here??

Answer 5

All of these