The most recently developed type of microscope from your options is the scanning tunneling microscope (STM), which emerged in the 1980s. However, advancements and newer techniques in microscopy, particularly in light-based and fluorescence microscopy, continue to evolve. If you're asking for the most recent innovation, newer forms of fluorescence and super-resolution microscopy techniques (like STORM and PALM) have been developed in the 21st century, which offer greater resolution than traditional fluorescence microscopes.
Since the question seems to aim at a specific option from your list, it would generally be the light based microscope or fluorescence microscope as they have newer iterations and techniques being developed continuously.
If you need clarity on a specific recent, notable development, please provide more context!