Asked by MEMS
----------------------- used to align wafers with the mask in mask aligner.
I. Linear translation in horizontal plane
II. Rotational motion
III. Linear translation in vertical direction
IV. Spiral translation
I, II III
II, III, IV
I, III, IV
IV only
I. Linear translation in horizontal plane
II. Rotational motion
III. Linear translation in vertical direction
IV. Spiral translation
I, II III
II, III, IV
I, III, IV
IV only
Answers
Answered by
Ms. Sue
I wouldn't insult your intelligence by telling you these answers.
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